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Surface and Microbeam Analysis Group

Surface analysis is very important for material characterization such as electronic devices and composite materials. Surface and micro-beam analysis is carried out as the elemental analysis, quantitative analysis, determination and identification of chemical compound or chemical state in the surface or near surface of the sample, by using X-ray or fine focused electron beam or ion beam for the probe, and by utilizing electron spectroscopy, X-ray spectroscopy and secondary ion mass spectrometry for the detection method. The aims of our group are development of newly and/or highly analysis method based on surface analysis technology, provision timely results and information of requested analysis to user, and standardization of analytical techniques.

Specialized Research Field

・X-ray photoelectron spectroscopy (XPS)/Auger electron spectroscopy (AES)

The elemental analysis and chemical state analysis on the surface and/or localized small area on the surface are carried out by detection and analysis of X-ray photoelectron and Auger electron emitted from the sample surface by the irradiation with X-ray or electron beam. Especially, X-ray photoelectron spectroscopy (XPS) equipment is widely used as the chemical state analysis method.


・Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS)

TOF-SIMS is the method for analysis of the composition of solid surfaces (sampling depth ~1nm) by sputtering the surface with a focused primary ion beam and collecting and analyzing ejected secondary ions with time of flight technique.  TOF-SIMS provides mass spectra with high mass resolution, 2D/3D fragment ion image with high lateral resolution (~100nm), and high sensitivity measurement (>ppm) rather than XPS and AES. Especially, TOF-SIMS is significantly powerful tool for investigating organic materials surface because it analyzes fragment ions and molecular ions.


・Electron Probe Micro Analyzer (EPMA)

Micro-beam analysis is the method for the morphological observation of the sample precisely, and/or elemental analysis and chemical state analysis in small feature using X-rays emitted from the sample by fine focused electron beam incidence. Electron probe micro-analyzer (EPMA) using the characteristic X-ray obtained from the sample is especially effective for grain boundary analysis, etc.


・The state of the art high-resolution electron microscope is also in operation, which can be used as scanning transmission electron microscope (STEM)

For whichever analysis methods, the request analysis is only available, because the high specialty and skill are frequently needed for sample preparation and especially data reduction in many cases.