Surface Chemical Analysis Group

Three dimensional (3D) chemical analysis of surface layers with high spatial resolution is very important for material characterization. Then, we plan to develop new analysis method with high accuracy for 3D-chemical information (elemental distribution, chemical state, and morphology) on the surface layer using Auger electron microscopy, X-ray photoelectrons spectroscopy, electron probe microanalysis, elastic peak electrons spectroscopy, and reflection electron energy loss spectroscopy, and so on. In order realize this purpose, we have to integrate the information obtained from above spectroscopies. We, therefore, plan to develop the electron transport simulator in solid for surface chemical analysis and the high accuracy database for electron inelastic scattering in solids, which will be used in the simulator.

Specialized Research Field

Development of electron transport simulator and its application

The emission depth distribution function (EDDF) is essential for the quantitative nondestructive depth-profiling by angle-resolved (AR) XPS. By the electron transport simulator, we evaluated the EDDF in consideration of asymmetry parameters of Ni 1s photoelectrons (binging energy 1094.6 eV) excited by linearly-polarized hard X-rays. Figure 2 shows the EDDFs using the asymmetry parameters including the multipole transition term (left) and the dipole transition term without multi-pole transition (right). The simulator enabled us to analyze precisely the experimental AR-XPS spectra and revealed that the asymmetry parameter originates from multi-pole transition.

"Fig. The effect of multi-pole on the emission depth distribution function (EDDF) calculation with our simulator" Image

Fig. The effect of multi-pole on the emission depth distribution function (EDDF) calculation with our simulator

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