NIMS Nanofabrication Facility

2023.04.01 Update

The NIMS Microfabrication Cleanroom is a shared facility that can be used not only by NIMS researchers, but also by other researchers from companies and universities, etc. The two cleanrooms are equipped with a total of about 60 state-of-the-art microfabrication process devices and observation and measurement devices. The facility has been used by many companies and universities to conduct research on a wide variety of materials, including not only silicon, but also compound semiconductors, oxides, metallic materials, nanotubes, and nanosheets. Our mission is to contribute to the creation of innovations originating from shared facilities through the shared use of microfabrication clean room facilities and equipment, as well as process technology development and technical support. We hope you will utilize our facilities for various phases of research and development, from basic fundamental research to applied technology development.