A33：Cross-section polisher_2 (CCP)NanoGREEN Bldg. E-108
|
Maker |
JEOL |
|---|---|
|
Model |
IB-19520CCP |
|
Use for |
Preparation for pristine cross sections of a specimen for SEM and AES. |
|
Outline |
This equipment polishes the cross section of a sample by irradiating it with an Ar ion beam through a shielding plate. The sample cooling system can adjust the temperature from 0℃ to -120℃. It can be transported without coming into contact with the air. |
Specification
|
Ion accelerating voltage |
2 to 8kV |
|---|---|
|
Ion-beam diameter |
500㎛ (full width at half maximum) |
|
Milling speed |
300㎛/h @8kV (on a silicon substrate conversion basis) |
|
Specimen movement range |
X-axis: 10㎜ Y-axis: 3㎜ |
|
Specimen-rotation angle adjustment range |
±5° |
|
Specimen-milling swing angle |
±30° |
|
Transportation |
Non-atmospheric exposure analysis is available with transfer-vessel. |
Notice
- As this is an ultra-high vacuum instrument, samples containing volatile components that may contaminate the chamber cannot, in principle, be measured. Please consult us in advance regarding such samples.
