14:30-15:30
Accessing to the nanoscale: from charged particle beams to scanning probe techniques.
Dr Gemma Rius(Toyota Technological Institute, Nagoya, Japan)
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As a starting point, I will relate my main results achieved for the fabrication of nanomechanical and nanoelectronic devices by means of electron and ion beam based approaches. In particular, the technology developed for nanomechanical resonators and CNT-FETs will be described. In addition, some issues to guarantee the compatibility during nanodevice integration in CMOS and, suitability of using energetic charged particle beams, for both top-down and bottom-up approaches, will be presented as well.
I will also talk about my current research activities on the study and exploitation of the specific properties of CNTs for applications in scanning probe microscopy (SPM). Specifically, I will show a technological approach that we are using for the integration of CNTs in commercial probes, focusing on the atomic force mediated characterization of the CNT probes. I will briefly show some examples of i) topographical imaging, ii) electrical conductivity measurements, simultaneous to force curves, for the analysis of contact mechanism and its in-house confirmed use as a nanolithography tool, and iii) their application to study of other physical-chemical parameters, such as relative humidity.
A deeper insight will be given for the consecution of functional CNT-based probes, in particular for KPFM. After relating the main fabrication lines that are being tested and their characteristics, I will actually conclude with some preliminary results on surface potential imaging.