Artificial fabrication and characterization of large magnetic anisotropy ferromagnet “L10-ordered FeNi”

Abstract

Magnetic materials with large uniaxial magnetic anisotropy are attracting much attention.Particularly, L10-ordered alloys are well known as materials with large perpendicular magneticanisotropy, and we have studied on artificial fabrication of L10-ordered FeNi thin films by analternative monatomic layer deposition method. However, it is also needed to fabricate L10-FeNi thin films by a simple method for a practical use. In this paper, we tried to fabricate L10-FeNi thin films by co-sputtering and post rapid thermal annealing (RTA), since RTA wasreported to be useful for obtaining highly-ordered, highly-textured thin films for L10-orderedFePt. Structural and magnetic properties of the fabricated films were precisely investigated.