Nanotube Group / MANA

Atom-discriminating electron microscope (JEM-3100FEF)	High resolution field emission analytical electron microscope (JEM-3000F)
The world's first energy filtering electron microscope with an accelerating voltage of 300kV equipped with OMEGA-type energy filter in the microscope column. It is capable of recording elemental maps with the resolution of 0.5nm.	Analytical electron microscope equipped with field emission electron gun. Capable of analyzing using of an electron probe of 0.4nm in diameter.


Carbon nanotube deposition apparatus	Infrared radiation heating system
An apparatus to fabricate carbon nanotubes by the use of plasma	An apparatus to heat materials by infrared irradiation


Apparatus to create nanostructural materials	Apparatus to measure heat in nanoscale materials
A high frequency heating furnace to fabricate nanotubes	Apparatus to measure thermal properties of nanomaterials.


Laser vaporization apparatus using a high temperature gas	Oxide thin films sputtering apparatus
An apparatus to fabricate novel nanomaterials by vaporizing targets instantaneously by laser irradiation	An apparatus to create multilayered oxide thin films by sputtering


Scanning electron microscope (JSM-6700F)
A microscope for observation of nanomaterials using a scanning electron beam. Equipped with a field emission electron gun.