Individual microparticles or microparts can be transferred by sticking to a probe (needle) tip, and then arranged or assembled under the observation of a real-time image of a scanning electron microscope. This technique is applicable to objects as small as 70 nm made of any types of solid materials such as metals, semiconductors, ceramics, and polymers (conductivity is necessary for objects larger than several micrometers). In addition to the options such as a reflection electron detector and an X-ray analyzer, assistance systems such as graphical template software for accurate assembly, and peripheral instruments for fabricating various probes are available.