Laser Assisted Wide Angle Three-dimensional Atom Probe

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National Institute for Material Science

Laser Assisted Wide Angle Three-dimensional Atom Probe

  Three-dimensional Atom Probe assisted with femtosecond laser pulse. It can analyze wide variety of materials including metals, semiconductors and their devices, ceramics.
3DAP map of Dy-diffusion processed Nd-Fe-B sintered magnet(~30nmx30nmx100nm)
Inserting Sample
Laser Wavelength Converter
(1030nm to 515nm, 343nm, 257nm)
Stage Holder
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