Local Electrode Atom Probe Microscope - LEAP5000XS

  The 3D atom probe method can detect and identify the position of single atoms including light elements, which are difficult to observe with electron microscopes. It is also very effective in analyzing the distribution of elements within a variety of materials or devices.

  The 3D atom probe method is the only method to visualize the distribution of atoms as 3D tomography at a magnification ratio of over 1 million by simultaneously measuring the mass and position of atoms ionized with lasers from the tip of a needle-shaped sample. For example, this method can precisely analyze the distribution of elements within a nanoscale device or the uneven distribution of nanoscale elements within a material. While even the latest transmission electron microscope (TEM) has difficulty in quantitatively analyzing light elements segregating to a defect, the 3D atom probe makes it possible to directly observe elements segregating to a defect on the atomic plane or a one-dimensional defect within a crystal called dislocation.

  The "LEAP5000XS" is straight flight path with 355nm UV laser pulsing atom probe system.

  Transferring 3DAP samples between FIB-SEM and 3DAP machine kept at low temperature and without air exposure is possible by using VCTM(Vacuum and Cryo Transfer Module).