High Voltage Electron Microscopy
Sharing high voltage electron microscopy facility and nano-characterization technique
The high voltage electron microscopy facility is improving dynamic atomic/molecular observation techniques and spatial resolution. It also develops remote operation systems for shared use of various types of transmission electron microscopes.
Introduction
In the High-Voltage Electron Microscopy Station (HVEMS) of NIMS, we are conducting the research and development (R&D) of HVEMs and related instrumentations of various types of advanced electron microscopy, for "Nano-technology" and more basic studies of materials Science.
The NIMS’ best HVEM and its function
NIMS has installed many types of electron microscopes. We, here, are introducing a high voltage electron microscopes at Namiki-site.
Dual ion beam interfaced high-voltage transmission electron microscope
This ion beam and TEM system is now used for high-resolution TEM observation under ion implantation, ion/electron beam mixing and heating/cooling conditions. The maximum energy of electron and dual ion systems are 1000, 200 and 30 keV, respectively. The images from video, imaging plates and films are obtained in-situ.
High-Resolution, High-Voltage Electron Microscope
Ultra-high-resolution, high-voltage electron microscope (Hitachi: H-1500) achieved point-resolution of 0.1nm in 1990, which was the world record at that time. High-resolution atom imaging is available at 400-1300kV, and the images can be recorded on EM-films, imaging plates (IP), and also dynamically by the CCD camera.
Atom-discriminating electron microscope
Atom-discriminating electron microscope is equipped with OEMGA-type energy filter in the microscope column. It is possible to observe elemental distribution images with the resolution of 0.5nm.
