Acceleration Voltage : 300kV, 200kV, 100kV

Electron source: Cold field-emission electron gun (cold-FEG)

Minimum probe size : 1 nm

Point resolution : 0.2 nm

Electron energy loss spectrometer : Gatan Imaging Filter (GIF2002)

• Energy Resolution : 0.27 eV

Energy dispersive x-ray spectrometer : KEVEX

Specimen Holder

• Side-entry holder (cooling Liquid N₂)

• Side-entry holder (cooling Liquid He)

• Side-entry holder (heating)

Recording media: Film, Imaging Plate, CCD-Camera

Since 1997